序號 |
項目 |
單位 |
規格值 |
|
1 |
氫氟酸Assay |
HF |
wt% |
≥99.999 |
2 |
氯化物Chloride |
Cl |
ppb |
≤100 |
3 |
硝酸鹽Nitrate |
NO3 |
ppb |
≤100 |
4 |
磷酸鹽Phosphate |
PO4 |
ppb |
≤100 |
5 |
硫酸鹽Sulfate |
SO4 |
ppb |
≤100 |
6 |
硅Silicon |
Si |
ppb |
≤100 |
7 |
鐵Iron |
Fe |
ppb |
≤50 |
8 |
鎳Nickel |
Ni |
ppb |
≤50 |
9 |
鉻Chromium |
Cr |
ppb |
≤50 |
10 |
銅Copper |
Cu |
ppb |
≤50 |
11 |
鈉Sodium |
Na |
ppb |
≤50 |
12 |
鈣Calcium |
Ca |
ppb |
≤50 |